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Wafer And Thin Film Instrumentation
Engineering Standards: 1 - 2 of 2
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PRACTICE FOR DETERMINATION OF UNIFORMITY OF
THIN
FILMS ON SILICON WAFERS
...
wafer
-to-
wafer
or lot-to-lot variations. This practice is intended for use with any
thin
film
or layer type, or formation technique, for which basic measurement
instrumentation
and capability exists ...
View Standard Detail
Standard Practice for Determination of Uniformity of
Thin
Films on Silicon ...
...
wafer
-to-
wafer
or lot-to-lot variations. 1.3 This practice is intended for use with any
thin
film
or layer type, or formation technique, for which basic measurement
instrumentation
and capability ...
View Standard Detail